JPH0617787Y2 - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPH0617787Y2
JPH0617787Y2 JP10699288U JP10699288U JPH0617787Y2 JP H0617787 Y2 JPH0617787 Y2 JP H0617787Y2 JP 10699288 U JP10699288 U JP 10699288U JP 10699288 U JP10699288 U JP 10699288U JP H0617787 Y2 JPH0617787 Y2 JP H0617787Y2
Authority
JP
Japan
Prior art keywords
substrate
elevating
guide rail
shaft
bearing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10699288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228847U (en]
Inventor
正美 大谷
雅美 西田
英治 奥野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP10699288U priority Critical patent/JPH0617787Y2/ja
Publication of JPH0228847U publication Critical patent/JPH0228847U/ja
Application granted granted Critical
Publication of JPH0617787Y2 publication Critical patent/JPH0617787Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP10699288U 1988-08-15 1988-08-15 基板搬送装置 Expired - Lifetime JPH0617787Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10699288U JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10699288U JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0228847U JPH0228847U (en]) 1990-02-23
JPH0617787Y2 true JPH0617787Y2 (ja) 1994-05-11

Family

ID=31340998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10699288U Expired - Lifetime JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0617787Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999028220A1 (fr) * 1997-12-03 1999-06-10 Nikon Corporation Dispositif et procede de transfert de substrats

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6371173B2 (ja) * 2014-09-10 2018-08-08 株式会社Taiyo 電動グリッパ装置
JP6267610B2 (ja) * 2014-09-11 2018-01-24 株式会社Taiyo 電動グリッパ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999028220A1 (fr) * 1997-12-03 1999-06-10 Nikon Corporation Dispositif et procede de transfert de substrats

Also Published As

Publication number Publication date
JPH0228847U (en]) 1990-02-23

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